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vol.49-1(2011/5/31)
| Lifecycle CO2 Reduction in Diversified Air Filters |
| Widening efforts to promote energy conservation is exemplified in the air filtration industry in the shift towards development of energy-saving, low pressure drop filters. Also, as energy conservation contributes to the mitigation of climate change and demand-side cost reduction, the development of energy saving filtration products has become critical to filter manufacturers. Further, with projections of grave long-term impacts to energy supply resulting from the recent 2011 Great East Japan Earthquake, air treatment systems that can accommodate power consumption reduction requirements are increasingly vital. To contribute to efforts to reduce environmental impact, Cambridge Filter Japan has developed energy-saving Medium Efficiency and HEPA filters, and eco-friendly washable filters. To demonstrate the contribution of these filters to the reduction of greenhouse gases, filter lifecycle carbon dioxide emission volume was calculated. |
| Air filter recycling and LCA evaluation |
| This paper introduces air filter recycling, and reports its LCA evaluation. Effective utilization of air filter materials are described about reduce, reuse and recycling. LCA is widely applied to estimate the environmental effective evaluation. Two types of medium efficiency particulate air filters are evaluated with LCA method. It is useful to developing an eco-friendly product. |
| Challenge to recycling and environmental measures with air filter |
| In recent years, the reduction of CO2 emission is keenly required from the point of view of CSR(Corporate Social Responsibility). Comparing to use the natural resources, to adapt the recycling system, that is getting the resources and the energy from industrial waste, will reduce the amount of the energy consumption. Therefore, the great reduction of CO2 emission is expected by using recycling system. In addition to CSR, because of the power shortage caused by the terrible earthquake, saving electricity is absolutely needed. As one of measures to save the energy, we would like to introduce our recycling system of the air filters. (1) Utilizing used air filters as combustion improver for the kiln of the cement. (2) Gasification Melting System (3) Electric Melting System In addition to above, we would like to highlight our “MiraPak RU”, of which initial resistance is quite low. Low initial resistance helps you to save the energy and electricity. |
| Safety of nanoparticles, measurement of exposure and care of its handling |
| As for hazard assessment of nanoparticles, results from bolus-type dose delivery like intratracheal or intraperitoneal instillation should not be used for risk assessment. Toxic effects of different CNTs seem to depend on the form (length) and physico-chemical properties. The allowable exposure concentration of occupational environment for fullerens, nano-TiO2 and some types of CNTs are proposed from subchronic inhalation studies. And nanoparticle concentrations can be measured by a combination of direct-reading, handheld instruments and filter-based air sampling. This technique can be used to evaluate nanoparticle exposure and the effectiveness of engineering controles in occupational settings. |
| Analytical technology for gases |
| Analytical technology using APIMS and CRDS is introduced for the moisture in the gas that is a still big issue by its strong adsorbent characteristics. That for the ions and metals in the gas is also introduced. APIMS has largely and widely contributed to make ultra clean bulk gas, especially nitrogen gas. CRDS has played a major role to purify the special gases, since it can analyze the ppb level moisture and other impurities in these gases in the addition to the bulk gas. It is expected that the analytical technology for the gas will improve steadily in the future, by using the combination of the various analytical methods of APIMS and CRDS that can directly measure the impurities, or IC, ICP-MS and TXRF that can measure the anions and metals which need the suitable absorbent. |
vol.49-2(2011/7/31)
| Technology Requirements of Cleanroom for Semiconductors on WECC (Wafer Environmental Contamination Control) in ITRS |
| ITRS (International Technology Roadmap for Semiconductors) is revised every two years to maintain the Moore’s Law. ITRS is devided into 14 technologies and technology requirments of cleanroom ambient are described in WECC (Wafer Environmental Contamination Control) section of Yield Enhancement chapter. In this article, the contents of technology requirements of cleanroom ambient and their changes from 2001 to 2010 are summarized. |
| Innovation of semiconductor factory by creating minimal fab |
| We propose the minimal fab concept which reduces an investment of a semiconductor fab down to about 5 million dollars. The minimal fab uses wafers whose diameter is half inch. A minimal apparatus in the minimal fab has 30cm in width, and 144cm in height. We have been developing a local-clean wafer-transfer system and main process apparatuses for lithography. |
| Countermeasure to the Airflow Fluctuation and the Contamination in Clean Stockers used for Large-scale Glass Substrates |
| The purpose of this study is to characterize airflow fluctuation, which occurs by the motion of large transport vehicle, and to improve airflow environment in the cleanroom. 1/10-scale model was used for this study. This model has rack area and vehicle's running area. Rack area has FFUs (Fan Filter Units) on sidewall and ceiling, and they provide airflow distribution from rack area toward vehicle's area. Pressure at the boundary between these areas shows a steep change while the vehicle was moving across measuring point, and it causes counter flow and it would bring contamination in rack area. Airflow around the measuring point was visualized using laser light sheet and water mist, and flow states at different FFU conditions were compared. As the result, the most desirable airflow state was obtained. |
| Clean room at lithium-ion battery factory |
| Though a clean room for manufacturing of the semiconductor and the liquid crystal factory is typical, a clean room of the lithium-ion battery as a different usage is introduced in this report. The lithium-ion battery is manufactured in the environment that is called a dry room where the volume of water was extremely decreased. Therefore, not a clean room but a dry room is chiefly described here. In a dry room, the dew point temperature is controlled at -10℃ or less to improve the quality of the product. The rotor type dehumidifier with a silica-gel rotor is used for a dry room to make it to a low dew point. Because dehumidification need very big energy, energy conservation is important. Recently, for reducing the energy consumption when the load in winter is small, the energy saving control system is adopted in a dehumidifier. |
| Task and Ambient Air Cleaning System |
| As industrial cleanrooms become larger and require higher levels of cleanliness, important issues such as the increased energy consumption and increased resources for construction arise. In light of this background, a new innovative energy and resource saving system was developed by separating the heat treatment and cleaning functions and by using the minimum elements required for a cleanroom system. The resulting high cleaning performance “Task & Ambient Air Cleaning System” uses less energy than conventional systems (converted to a 60% reduction in CO2 compared to conventional systems) and substantially fewer raw materials for construction (50% compared to conventional systems). |
| Earthquake measures technology in semiconductor manufacturing facility |
| The 2011 off the Pacific coast of Tohoku Earthquake caused large damage on northeastern part of the Japanese main land. The semiconductor manufacturing facilities sustained damages as a result of the earthquake. Serious damage was also done to the semiconductor manufacturing facilities in the South Hyogo prefecture Earthquake (1995) and the Mid Niigata Prefecture Earthquake (2004). The technology that defends manufacturing facility against the earthquake is needed in Japan where the earthquake occurred frequently. This report introduces the systems that uses a base isolation structure, a small displacement base isolation system for manufacturing equipment, and the real-time earthquake information for earthquake measures of the semiconductor manufacturing facility. |
| Air-conditioning System for a Data Center |
| The concentration and performance of the information processing devices that make up these systems are increasingly rapidly, and this has led to an increase in the heat concentration of Data Centers as well. For this reason, air conditioning systems for Data Centers must offer an effect of machines cooling characteristics on air conditioning efficiency and a high level of reliability to constantly maintain appropriate room temperatures. In this paper, we will use the previously proposed calculation method to conduct the following studies, targeting cases in which the systems have actually been implemented. 1) We created a machine cooling model that relates the temperatures in different parts, derived the parameters that affect the machine air intake temperature, and analyzed the factors that govern the machine cooling characteristics. 2) Simulation to grasp the reliability characteristic in the system. |
| Maintenance system of class II biological safety cabinets in Tottori University, and its introduction to a developing country |
| Biological safety cabinets (BSCs) are required to protect the operator and the laboratory environment from an exposure to infectious pathogens. BSCs should be well maintained to ensure the proper operation. All of the inspections and the repairs of BSCs should be made by a qualified technician. A payment by each laboratory for the regular checkup/adjustment/repair to a repair company is a heavy burden. To reduce the cost problem, we started a self-maintenance system by the technicians in Tottori University. We are now planning to introduce the similar low cost BSC maintenance system to a developing country. |
| Trend in Standards for Odor |
| In this document, the history of the ventilation requirement is outlined to know how indoor odor was considered before. Several times of Paradigm Shift on the idea of ventilation occurred in these 200 years. The perceived air quality was one of important idea to apply to the measurement of indoor air contaminant. In 2005, the standard for indoor odor was first published in Japan. This standard is based on the acceptability of people exposed to the odor. The outline of this standard is described in this document. At present, ISO Standards on odor measurement are being formulated. The characteristics of the ISO standard (draft) are introduced and the some differences between Japan standard and ISO standard are commented. |
vol.49-3(2011/9/30)
| Characteristics of Radioactive Material |
| Radiation, radioactive material, radioactivity, unit, quantity and basic terms were easily summarized for unfamiliar readers on radiation. Radioactive elements including elements produced in reactor were explained about generating source and existing location in environment. Finally, the mechanism of radiation injury, deterministic effect and stochastic effect, external exposure and internal exposure, and natural radiation exposure in Japan were also described briefly. |
| An overview of approaches for radiation risk assessment |
| Principles of radiation protection are based on risk assessment which has been established by accumulating of scientific research in various fields. To communicate radiation risks in the society, it is necessary to have a common understanding of approaches for the radiation risk assessment. The actual radiation risk assessment consists of very wide range of scientific knowledge, such as physical or chemical properties of radiation, biological mechanisms, mathematical models, and public health research. In this paper, to properly understand the risks of radiation, basic concept of radiation risk is described, and approaches for risk assessment of environmental radiation are also outlined. |
| Behavior of radioactive materials in the environment and their dose assessment |
| After the nuclear accident at the Fukushima nuclear power plant, a large amount of radioactive materials were released to the environment. This accident gave a great impact to our living environment. Unfortunately the release of those radioactive materials has not yet stopped. Under such unstable situation, many Japanese citizens worry about their health. However, many environmental and radiological sciences have been carried out and many lessons and new scientific findings could be given throughout several major accidents. For correct understanding of general public on radiation, radioactive materials, the present paper describes how the radioactive materials behave in the environment, how they are measured for dose assessment and how large they influence on human health effects. |
| Principle of radiation protection and radiation safety standards |
| Radiation exposures of the recovery workers and inhabitants living in the contaminated area due to accident of TEPCO's Fukushima Dai-ichi Nuclear Power Station become a significant issue. Various dose criteria for radiation protection measures were set by different authorities. Principle of radiation protection and radiation safety standards are overviewed. |
| Enhanced monitoring of environmental radioactivity levels in Tokyo |
| The 2011 off the Pacific coast of Tohoku Earthquake on 11 March and the following Tsunami caused a terrible destruction of Fukushima Daiichi Nuclear Power Plant of the Tokyo Electric Power Company. By this disaster, huge amount of artificial radioactive materials were emitted in the air and ocean, and brought widespread radioactive contamination of air, water, soil and agricultural products around the Tohoku and Kanto Districts of Japan. The Tokyo Metropolitan Institute of Public Health made preparations to take the enhanced monitoring of environmental radioactivity immediately after receiving the direction from the Ministry of Education, Culture, Sports, Science and Technology. The direction included measurements of the air absorbed dose rate by the monitoring post, and radioactive material level of fallout and tap water by the highly sensitive Ge semiconductor detector in every day since the day of the direction. The monitoring post recorded the maximum value of the air absorbed dose rate 0.809 μGy/h on 15 March, and 1-hour average value of this day was 0.496 μGy/h. It increased again from 21 March, and showed the peak value of 0.155 μGy/h (1-hour average value) on the 22 March and then decreased slowly, though the value exceeding 0.1 μGy/h was recorded till the end of March. In April and afterwards, measured value decreased gradually and became a background level below 0.060 μGy/h in July. By the analysis of the radioactive nuclides of fallout, 131I was detected 36000 Bq/m2 as a maximum value on the 23 March, and maximum values of 134 Cs and 137 Cs were also detected 5300 Bq/m2 on the 22 March, respectively. After that, they decreased gradually and became below the detection limit after the middle of May. As for tap water, 131 I was detected 37 Bq/kg as a maximum value on 26 March, peak values of 134 Cs and 137 Cs were 1.0 Bq/kg and 1.4 Bq/kg, respectively on 24 March. After that, they decreased and became below the detection limit after 4 May. Considering the influence of these radioactive materials on the human body, the rate of air absorbed dose rapidly increased on 15 March, but the daily average value was 0.109 μGy/h, and was very low level as the external exposure dose per day. The total value of effective dose of the internal exposure was calculated as 7.6 μSv (0.0076 mSv) from the amount of radioactive materials in tap water detected from 18 March by present time and an assumptive tap water consumption of 2L per day, and was estimated to be very slight. |
| The Frontiers of Crystalline Si Solar Cells |
| Over the past ten years, the world-wide photovoltaic market has grown from 0.25 GWp in 2000 to 16 GWp in 2010 due to the technology development and also government support. The rapid expansion of the PV market introduced a drastic module price reduction from about $6/Wp to less than $2/Wp. The recent price reduction of the c-Si modules was mainly realized by the automated mass production using the turn-key cell and module production lines in addition to the multi-wire slicing of Si ingots. Further price reduction is expected by considering recent advanced technologies including the high-efficiency back-contact cells, the use of thinner wafers and so forth. Other issues are the cost reductions of Si feedstock and balance of system including inverters and installations. The BOS cost will be reduced by constructing mega-scale PV systems. |
| The occurrence of odor in the house, its components |
| There are a lot of unpleasant odor in the house. In particular, the house odors of others, contemplate uncomfortable. In this paper, we consider the matter and the cause of unpleasant odors. The first cause of the occurrence of the odor is the work of bacteria and mold. For example, the odor of garbage in the kitchen, the odor of fish, body odor, bathroom odor, and odor generated from the air conditioner is mainly due to action of bacteria. The second cause of the occurrence of the odor is caused by heating or burning. For example, cooking odor and smoke odor can be mentioned. In the living environment can completely eliminate unpleasant odors is impossible. Therefore, it is important that we accept the unpleasant odors in daily life. |
vol.49-4(2011/11/30)
|
Contamination control in the space development field -a material evaluation approach- |
| Contamination control is one of the key themes in the space development field because of the propensity for contamination in the space environment and the fact that spacecraft are equipped with devices sensitive to the same. In this paper, contamination control in the space development field is introduced, especially in terms of a material evaluation approach. “Outgassing tests” are practically utilized to screen materials and avoid the use of unsuitable materials for spacecraft as a source of contamination. Outgassing tests can be used to determine “Total Mass Loss” (TML) and “Collected Volatile Condensable Materials” (CVCM) under fixed conditions by ex-situ mass measurement. There is also an advanced method, namely “outgassing rate tests”, which is an in-situ measurement method with temperature-controlled Quartz Crystal Microbalances (QCMs). Here, TML and “Volatile Condensable Materials” (VCM) can be continuously measured. Contamination analysis software “J-SPICE” is also being developed by JAXA to simulate how thick contamination would be deposited on a spacecraft during a mission in orbit. To analyze the outgassing rate data, the geometry of the spacecraft to be analysed, etc. are required as input data. In addition, the result obtained by a space experiment performed on the International Space Station (ISS) is introduced. |
| Contamination Control in Environmental Testing of Spacecrafts |
| The contamination control of the spacecrafts becomes more important as the higher performances are required on the spacecraft devices such as optical sensors. The contamination control of the spacecrafts is performed in all phases i.e., design, manufacturing, testing, launch, and operation on the orbit. Above all, testing carries a high risk of contamination. There are various test facilities in JAXA Tsukuba space center, and the environmental tests of the spacecrafts are conducted. In this paper, the contamination control performed in the environmental tests of the spacecrafts is described. |
| Optical property measurement of molecular contamination |
| In recent years, the performance of optical apparatus carried in spacecraft has been improving. Conversely, the lifetime of spacecraft has shown a tendency toward protraction. Therefore, it is important that the performance of optical apparatus be maintained over an extended period to ensure the success of spacecraft missions. It is known that molecular contamination adversely affects the performance of optical apparatus on spacecraft. Since molecular contamination occurs as outgassing from various organic materials of spacecraft continuously in orbit, the outgassing property of all materials used in spacecraft, the adhesion to optical apparatus of molecular contamination when a space craft comes to the end of a mission, and the optical property of molecular contamination for all materials used in spacecraft must all be evaluated. In this paper, I introduce various methods to evaluate the optical property of the molecular contamination for all materials used in spacecraft, subject of the technique for evaluating the optical property of molecular contamination. |
| Evaluation of contamination effects for earth observing optical sensors |
| Optical sensors equipped in satellites are powerful tool for global and continuous monitoring of the earth surface. However, output signals of most of optical sensors have shown the degradation as a function of the elapsed time in orbit. There are some candidates for the cause of degradation, such as, particulates, molecules, UV radiation. In order to clarify the phenomena occurred in orbit, it is necessary to evaluate the spectroscopic characteristics of contaminants because optical sensors have multi-band observing system with narrow band width. In this paper, several experiments for evaluating spectral characteristics of contaminants are introduced. As for particle contamination, optical surfaces may be degraded due to surface obscuration. Particles may also scatter light off and induce stray light which makes sensor’s image less contrast. These effects were evaluated as pilot study for the case of ADEOS-II ground operations. While molecular films formed onto optical surfaces may also make optics less transparent especially at absorption band of adsorbed molecules and volatile film may be colored by UV radiation. It began to start the spectral characteristics measurements for several kinds of organic molecule. The resulting database will help us to identify the contaminants which make sensor optics degrade in orbit. |
| Contamination control of the X-ray astronomy satellites |
| X-ray astronomy is one of the major astronomical fields together with the optical and radio astronomy. Since the discovery of the first extrasolar X-ray star in 1962, more than 30 X-ray astronomy satellites were launched to study the high energy universe unless otherwise accessible. Japan also has long history of X-ray astronomy launching 5 X-ray astronomy satellites so far. Contamination control became important for the X-ray astronomy satellites since the ASCA satellite of Japan in 1993, which adopted an X-ray CCD camera combined with an X-ray mirror for the first time. We learnt various contamination control technique step by step, but the control was not successful in the following Suzaku satellite launched in 2005. The X-ray CCD cameras on board Suzaku accumulated contamination exceeding 100 μg/cm2. We are now working on the contamination control of the next X-ray astronomy satellite, ASTRO-H. |
| INDOOR AIR QUALITY IN SPACECRAFT TEST AND FAIRING ASSEMBLY BUILDING |
|
In the field of space development, it is absolutely imperative to avoid the spacial contamination in the assembling facilities for spacecrafts and onboard equipments, to remove the negative influence on their performance and function. To establish the contamination control technique, we begin with the explanation on our overall control plan. In the second stage, disclosure of results of the measurement and analysis we performed on the real space will be made to measure the molecular contamination. For the purpose of enforcing the results above, we then present results of the measurement and analysis on the indoor air quality obtained in the satellite assembling facility at Tanegashima Space Center. The results were achieved by the study in phases beginning at the construction of this facility. In conclusion, we recount the fundamental theory of contamination control technique to construct new facilities for the purpose of assembling spacecrafts and onboard equipments, using the comprehensive evaluation of the measured results. |
| Influences of Moon Dust on Human |
| The harmful effect of moon dust (regolith) on human from technological and biological point of view has been reviewed. In physicochemical properties of regolith hazard-related factors are component fibrous materials and nanoparticles. As for the component of regolith, silicon occupies about 50%. Animal exposure studies have been performed using simulant of regolith, and it is suggested that harmful effect of simulant lies between crystalline silica (one of positive control) and titanium oxide (one of negative control). Fibrous materials may not have low solubility due to inclusion of alkaline and alkaline-earth metal (ex. Na, K, Ca and Mg). The nanoparticle in regolith may have harmful potentials due to the titanium oxide and silica. In migrograbity, the deposition of particles with less than 1μm in human lung did not decrease. These data in deposition of particles suggested that micron and submicron particles may be accumulated in the lung in microgravity. The researches on correlation between regolith behavior and microgravity are preliminary and very much limited, therefore it is necessary to perform lots of researches in this field. |
| Aspect of Ozone Application -Usage of ozone effective characterstic- |
| Ozone is a triatomic molecule, consisting three oxygen atoms, and is widely employed as an oxidizing agent and potent germicide for getting tasty and safe drinking water, disinfection of waste water, agriculture, food and beverage processing for disinfection and odor reduction. Additionally, they are expected to be adopted more in sewage and wastewater treatment field for water environment preservation and reuse of the treated wastewater. This is because ozone has a strong oxidation capacity, no harmful residues after decomposition, easy management and control characteristics. Accordingly, the ozonation technologies are great expected to play an important role in a wide variety of industries in future. |
| The present conditions of the offensive odor generated from the water |
| In late years it is in the tendency to utilize a flavor after having taken measures of the offensive odor because a technique and deodorization technology to cut off a offensive odor from the cause improved. The density of the in gas influences underwater density, but a law of Henry is applied basically. All materials of the offensive odor are not applied, and this law has temperature under uniformity with low concentration and the water is limited to pure substance and is applied, but is not applicable to real wastewater. Furthermore, it is difficult by an assay without being able to measure the underwater offensive odor using a direct sensuality examination to measure it by an indirect assay. In such inside including a sink, a restroom, a purified water tank, grease interceptor, the bathtub describe the present conditions, a cause, measures to be behind with the offensive odor measures technology from a liquid phase still more. |
vol.49-5(2012/1/31)
| Introduction of ISO/TC209 |
| ISO/TC209 has been discussing about the standardization of equipments, facilities, and operational methods for cleanrooms and associated controlled environments. This includes procedural limits, operational limits and testing procedures to achieve desired attributes to minimize micro contamination. The topics for cleanroom monitoring are airborne particles, surface cleanliness, room temperature and humidity profiles, airflow patterns and velocities, room vibration profiles, room light levels, room infiltration leakage, personnel procedures, personnel cleanroom clothing, equipment preparation, and any other topics related to optimizing cleanroom operations. This paper reports the contents of the discussion for each WG in ISO/TC209. |
| WG1: Revision of standard for airborne particle, ISO 14644 Part1 and Part2 |
| ISO/TC209/WG1 has made ISO 14644 Part 1 and Part 2. WG1 works for the revision for the standards since 2005. The ISO/DIS 14644-1 and 14644-2 were voted in 2011 and the WG1 has a meeting on October, 2011 in Milan for making discussion on the results. The ISO/DIS 14644-1 ballot received more than 200 comments, including approximately 150 technical comments. The Working Group was unable to complete a review of all the comments or consider the annexes that were to be imported from ISO 14644-3. Main issues included: elevated concern about the 5.0 micron particle limits, sampling and sampling locations, unusually large cleanrooms, and many comments that should have been presented at an earlier stage than DIS. The WG does not recommend that the current draft move to FDIS. A second DIS is required, but possibly on a shortened timeline. ISO 14644-2 did pass review with only a few comments, but it is felt that the documents should move through the system in tandem as they had originally. This could mean two years until publication of the Standards. |
| Activity situation report for microbial contaminants, ISO14698 |
| ISO/TC 209 resolves that WG 2 commences work on these two documents: a. Classification of airborne biocontamination in cleanrooms, including methods of measurement and their validation. b. Classification of surface biocontamination in cleanrooms, including methods of measurement and their validation. At the appropriate time during the development of these documents, the position of ISO 14698 Parts 1 and 2 should be considered, as well as a Risk Management Standard. (All in favor). This paper introduces the latest activity situation of ISO/TC209 WG02. |
| WG3: Revision of standard for test method (ISO14644 Part3) |
| Already about 6 years have been passed after 'ISO 14644 part3 (2005) Test Method' has established. Working Group 3 in the Technical Committee 209 started the study from 2010 to improve the standard for the next revision. After the 1st meeting of WG3 held in Tokyo in October 2010 during the ISCC 2010 (International Symposium on Contamination Control), other 2 meetings were held in London and in Milan. In these meetings, each item and sentence of part3 was carefully checked and the revision proposal of part3 has been discussed. Tests for airborne particle concentration will be moved to other parts, and a new item 'Microvibration test' will be added. The most drastic revision will be achieved in 'Recovery test' and 'Installed filter leakage test'. This report shows these discussions concerned with the next revision of part3. |
| WG8: Standard for air cleanliness by chemical concentration (AAC), ISO 14644 part8 and surface cleanliness by chemical concentration (SCC) |
| ISO/TC WG 209-8 had completed ISO 14644-8 2006. JACA No. 35A-2003 had been studied as one of the references published. After the publication of ISO 14644-8-2006, the WG started the study of improvement to be more popular as the standard. The new standard revised have been reached to DIS. The same member of WG 209-8 had started to standardization of surface Chemical Cleanliness. The votes and comments of the member countries on the DIS will be summarized by the end of this year. |
| WG9: Standard for surface cleanliness by particle concentration |
| ISO/TC209 WG 9 plays a role on standardizing the classification of surface cleanliness by particle concentration in cleanroom and associated controlled environments. In this article, we briefly review the history of standardization activities by WG 9 since its launch in 2003 and its current status of the new activities on standardization of surface cleaning. |
| WG10: Standard for nanotechnology in cleanroom |
| ISO/TC209 - WG10 “Cleanrooms and associated controlled environments - Nanotechnology” has been launched and the kick-off meeting was held in Seattle in June 2009. The members of WG10 are as follows, Co-Convenor : Dr. D. Ensor (USA) and Drs. A.M. Dixon(USA) and Secretariat : Dr. D.J.Michael (UK) and the WG members are USA, UK, Germany, Switzerland, and Japan. WG10 has 4 projects, 1) Classification of air cleanliness and Metrology, 2) Design, construction and start-up, 3) Operations and 4) Nanobio. The current main arguments have been the “Classification of air cleanliness by nanoscale particle concentration” and related measuring method for nanoparticles, and so on. |
| Bio-decontamination technology for a Room of Aseptic Processing Area in Pharmaceutical plant using Hydrogen Peroxide vapor |
| It is well known that the Hydrogen peroxide vapor is taking the most promising position of the bio-decontamination agent in an aseptic room to be a replacement for Formaldehyde, and then has been developing practically as one for the routine application in the industry. So, this paper shows that we tried to make a study how the relevant vapor has an impact on such microorganisms as Booklice or Fungi, and found it enables to control the inactivation of them. However, it is important to keep notes that the Hydrogen peroxide vapor may affect to the in-door facilities in the form of corrosion, therefore the monitoring of the vapor condensation is to be at least a mandatory measure to prevent. |
| Comparable Measurement of VOC-emissions from building materials followed by a standardized classification system |
| The outgassing behavior of materials used in cleanroom environments gains increasing importance in different industries. Especially in newly planned or built semiconductor, photovoltaic and aerospace cleanroom settings, a maximum allowed level of volatile organic contamination（VOC）according to ISO 14644-8 is already often defined in the planning phase. A newly standardized method for the determination and classification of building materials regarding their VOC outgassing properties is described in this article. Chamber measurements of different screened materials are performed using a micro-chamber and collection of the emitted VOC on Tenax sorbent tubes followed by thermo desorption gas-chromatography coupled with mass spectroscopy analysis（TD-GC/MS）. The calculated surface specific emission rate（SER）is then converted into a newly introduced easy comparable material classification number AMCm（or） ＝ x . The described method is published in the new guideline draft VDI 2083 part 17（2011）. A public available database for material selection and comparison gives all engineers involved in cleanroom planning and operation a useful tool to estimate the expected ISO-AMC level of total volatile organic compounds（TVOC）based on the selection of included materials. |
| Principles and Features of Deodorization Methods applied to Indoor Environment |
| Various kinds of offensive odor exist in indoor environment, and they often give an uncomfortable feeling to residents or workers. As a countermeasure, there is “reduction in uncomfortable feelings” based on one of the following methods: ventilation method, adsorption method, absorption method, sensory deodorization method, and oxidation method (ozone system, plasma system, and photocatalyst system). However, if the selection or usage of a deodorization technique has been mishandled, expected deodorization effects cannot be obtained. Then, this paper discusses the principles and features of existing deodorization methods applied to indoor environment. In addition, this paper comprehensively introduces a method to estimate rough deodorization effects and a method to determine the required capacity of deodorization equipment, prior to the adoption of deodorization equipment. |
vol.49-6(2012/3/31)
| Report of trends and issues for multi-package type air conditioning system |
| Recently multi-package type air conditioning systems are increasingly used in large buildings must be the only small and medium buildings. In this report, describe the history and trends on the multi-package type air conditioning systems in our country. Also, report the merit and future issues for this system. |
| Multi-split Type Air-conditioning System Verification Scheme and Example of Power Conservation Measures |
| In recent years the range of adoption of individual dispersed type HP package air-conditioning systems, referred to as “multi-split type air-conditioners,” has broadened, due to the priority on convenience and economics, regardless of whether the scale is large or small. This paper describes the scheme for the multi-split type air-conditioners adopted in the whole Kajima Akasaka Annex, and the verification scheme that is continuously implemented. The Kajima Akasaka Annex is an office building that was constructed adjacent to the existing Kajima K1 Building to consolidate the headquarters function of Kajima Corporation. It was completed in July 2007 and comfortably accommodates 1,200 persons. It was an aim to integrate the building equipment scheme while utilizing the characteristics of multi-split type air-conditioners. In the operation stage, a BEMS is used as a verification scheme to verify the high energy efficiency of the air-conditioning system, and a questionnaire survey and measurements were carried out to determine the status of the actual interior environment. Also, as a result of the demand for power conservation arising from the Great East Japan Earthquake, in summer 2011 power conserving operation was implemented. A power conservation test was carried out using occupied environment conditions as parameters, with the objective of continuously implementing power conservation in the future without sacrificing intellectual productivity, and a questionnaire survey was carried out regarding the effect of energy conservation and the intellectual productivity of the occupants. The results are reported in the paper. |
| The way of dealing with problems in the operation of multiple type air conditioners |
| Air conditioning systems with multiple type air conditioners are so common among offices, store buildings, or factories. They are very convenient for design, construction, individual control, handling, and so on. But lack of consideration when they are designed and constructed or neglect of maintenance over a long period of time sometimes leads to many problems in their operation. They can be divided into three types, problems as a result of construction or equipment trouble, problems related to indoor temperature or humidity, and problems caused by drainage slime. We explain in each case how these problems happen and the way of dealing with them. |
| Indoor Air Quality |
| In recent years, the individual distributed air-conditioning system shows the spread. More than the whole half of both small scale building and large scale building adopt individual distributed air-conditioning systems. However, since the interior unit of individual distributed air-conditioning is distributed indoors, it is the present condition that control of maintenance takes time and effort, and mind control of maintenance equivalent to a central system is not carried out. This paper describes the results obtained by investigations about the indoor air quality in an individual distributed air-conditioning system. |
| Dry room ～In order to build the low dew point environment～ |
| The lithium-ion battery is manufactured in the environment that is called a dry room where the volume of water was extremely decreased. In a dry room, the dew point temperature is controlled at -10℃ or less to improve the quality of the product. The rotor type dehumidifier with a silica-gel rotor is used for a dry room to make it to a low dew point. Because dehumidification need very big energy, energy conservation is important. Recently, a newly developed rotary desiccant dehumidifier will greatly improve the cost performance of the dry room facilities that are used in lithium-ion battery manufacturing. Two regeneration zones are used for one desiccant rotor of the new dehumidifier in order to accomplish the complete regeneration of the desiccant rotor. Adopting this dehumidifier instead of a conventional double-stage rotary dehumidifier will reduce the initial costs of dehumidifiers by up to 30%, and will reduce the annual running costs of dry room dehumidification by up to 30%. |
| A proposal of simplified procedure for in-situ leakage test of installed filter system |
| Installed filter leakage test described in ISO14644-3 and JIS B 9917-3 was studied to revise this test to the simplified in-situ test. First of all, characteristics of penetration through small leaks were experimentally studied using a HEPA filter, which has an artificially generated pin-hole. As the result, it was found that measurement of penetration at MPPS was not necessary and the measurement at 0.3um was effective to verify the leak. Three types of combinations for particle sizes which should be measured and acceptable particle counts were proposed as to perform leak test applying usual particle counters. For installed ULPA filters, the method to select test parameters based on the cleanliness class of the cleanroom was also proposed. |
| Practical use of room deodorizer and air freshener |
| Indoor environment is becoming clean, but consumer’s demand for room deodorizer and air freshener are increasing, in Japan. This means there are some changes of offensive odor in room and tolerance for scent of Japanese people. I suggested that “Home Smell” is becoming one of characteristic room odor in recent years. And the perfume which prepared for deodorize the Home Smell is effective. It because of the odor composition consists of aroma composition. So, the order is hard to deodorize by deodorant chemicals. On one hand, I introduced the standard of effect for room deodorizer and air freshener that regulated by Air fresheners and Deodorizers Conference in Japan. This may help to understand the performances of room deodorizer and air freshener. And I introduced the character of some product types of room deodorizer and air freshener. There are many types of product for those. So, this information may be useful to think about practical use for those products. Addition, I also introduced character of recent new products. Those products are applied some existing technology, but those are met consumer demand. |
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Air Cleaning Association